Organic Deposition Cell
This product is designed for thin film formation from materials of high vapor pressure (organic materials) and is a low-temperature cell (Organic Deposition Cell: KOD-Cell) that operates stably in low-temperature environments. KOD-Cell employs indirect heating, which achieves excellent temperature response and temperature stability.
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Power controller
(Sold separately)
KTC-2AAlq3 film is deposited on an ITO/glass substrate.
The photo shows a light-emitting element formed in this process.
<Source>
Japan Advanced Institute of Science and Technology
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| Type |
KOD-Cell |
| Crucible capacity |
1cc |
| Standard price |
¥480,000 |
| Estimate |
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| Heater |
Sheath heater |
Max. stable
operation temperature |
500°C |
| Temperature stability |
±0.2°C |
| Thermocouple |
Type K (C/A) |
| Crucible materials |
AlN-BN, high-density carbon, Al2O3, silica glass, and AlN |
| Crucible capacity |
1cc |
| Cooling system |
Water-cooling jacket (Stainless steel 1/4" tube) |
| Shutter mechanism |
Manually operated or compressed air operated (optionally available) |
| In-plane distribution |
The following distribution is guaranteed on a 2-inch diameter surface.
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| Material efficiency |
The following thin film formation from organic materials is guaranteed in the 1-cc crucible.
- At a rate of 1Å/s, a 50nm film can be formed at least five times from a 0.2g material.
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| Deposition rate |
It is easily possible to achieve 0.01Å/s. (Using a film thickness meter made by INFICON is recommended.) |
Target-Substrate
distance |
The recommended distance from the substrate to the deposition source is 250 mm. |
Deposition
characteristics |
See the chart below. |
Since the crucible capacity is small (1 cc), the cell can easily be used for various purposes.
The cell is made from carefully selected materials; its simple structure allows easy maintenance.
The materials are the same as those of sheath heaters, preserving uniform temperature.
The shutter mechanism easily allows the adjustment of vapor deposition.
- Excellent temperature stability: ±0.2°C
- Overshoot: 0.2°C or less
Temperature characteristics
of the organic deposition cell, KOD-Cell |
Vapor deposition characteristics
with low-rate control |
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- Thin film formation from materials of high vapor pressure
- Thin film formation from organic materials
*Our company can tailor the product (its stroke, shapes, etc.) according to the customer's specifications. Click here to contact us.
|
 *Notify us about the length. |
Power controller
(Sold separately)
KTC-2A |
| Type |
KOD-Cell II |
| Crucible capacity |
10cc/4cc |
| Standard price |
¥680,000 |
| Estimate |
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| Heating control temperature |
100°C to 500°C |
| Crucible materials |
AlN-Bn, high-density carbon, Al2O3, silica glass, and AlN |
| Power supply controller |
Main power supply: 100V AC, PID controlled |
- ICF-70 allows compactness and small footprint.
- The cell comes equipped with a shutter mechanism.
- Temperatures can be set with an accuracy of ±0.1°C.
*Our company can tailor the product (its stroke, shapes, etc.) according to the customer's specifications. Click here to contact us.
This product is a small-size AC power supply that complies with our organic deposition cells, the KOD Series. SCR phase control is used to control power supply. The specified supply voltage is 100 V.
| Type |
KTC-2A (Standard type) |
| Standard price |
¥250,000 |
| Estimate |
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| Type |
KTC-2ASP (with a program controller) |
| Standard price |
¥350,000 |
| Estimate |
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- SCR phase control is used to control power supply.
- REX-D100, a temperature controller distributed by RKC INSTRUMENT INC., is used as the controller (for the Standard type).
- If the customer wishes to control temperature with a program, PF900 (RKC INSTRUMENT INC.) can be used (for KTC-2ASP).
- The maximum current capacity is 20 A.
- The ammeter is 2 A to comply with the specifications of the KOD Series (since the set temperature is achieved when the specified current is equal to or less than 1 A).
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