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Thin film formation equipment

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Solar cell manufacture equipment

Solar Battery Nano Crystal SiC Deposition System

Dimensions
Solar Battery Nano Crystal SiC Deposition System
Features

This apparatus is designed for fabricating micro-crystalline SiC solar cells whit the methods of high frequency plasma CVD and hot-wire CVD. In order to form the i layer (the optical absorption layer in solar panels) and the pn layer separately, this system consists of totally 5 chambers; 3 chambers for thin films deposition, a sample transferring robot chamber, and a sample storage chamber.

Delivery record

東京工業大学 ( http://tkhshi.pe.titech.ac.jp/index.html

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Solar Battery Nano Crystal SiC Deposition System
* Our company can design and provide the system according to the customers' specifications. For details, click here to contact us.
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