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Beam flux monitor

Beam flux monitor

Dimensions
上下機構(ストローク:50mm)
回転機構付き
ビームフラックスモニター図面
PDF(拡大版)
本体側面
先端センサー部
Estimate
Beam flux monitor
Overview

Beam flux monitor is a device to measure the intensity of molecular beam from a crucible by using a tiny B-A gage, and is used in MBE system. This monitor is compactly mounted on a rotary feed through with ICF-700 flange. Any accessible length of the feed through is available on the customer's request.

Features
  • The monitor uses the miniature B-A gage made by Canon-ANELVA, which has long experience and reliability in the field.
  • ICF-70 flange is for mounting.
  • The sealed cover on the sensor can protect the sensor form exposure as much as possible.
  • An analog signal output is available.
  • Max.200℃ baking is possible.
  • Much less out gassing from the components of the monitor is realized by the special surface finish treatment.
  • The measuring the flux is ready to set up by just only rotating the sensor 180 degree.
Specifications
  • Sensor: Miniature B-A gage
  • Rotational angle : +/- 180 degree
  • Mounting flange size: ICF-70 (tapped)
  • Baking temperature: Max 200℃ (except: electric connector)
  • Option: Up/down elevating mechanism
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