Solar cell manufacture equipment

Solar Battery Nano Crystal SiC Deposition System

This apparatus is designed for fabricating micro-crystalline SiC solar cells whit the methods of high frequency plasma CVD and hot-wire CVD. In order to form the i layer (the optical absorption layer in solar panels) and the pn layer separately, this system consists of totally 5 chambers; 3 chambers for thin films deposition, a sample transferring robot chamber, and a sample storage chamber.

東京工業大学 （ http://tkhshi.pe.titech.ac.jp/index.html ）