Transmission Electron Microscope(TEM) Holder
Adopting Peltier modules as temperature control elements, observation without mechanical vibration is realized.
Wide range of temperature is supported: cooling up to -20 ℃ (*) and heating up to + 100℃. Our flexible customization (e.g. sample electrodes) offers environment for in-situ observation of various devices.
* The minimum temperature depends on the ambient temperature, since the heat is exhausted through natural air cooling.
- Large radiating fins mounted on the rear handle of the holder enables sample temperature of -20 C only with natural air cooling.
NOTE: During cooling, the holder insertion port cover on TEM has to be kept open for letting heat dissipate from the fins.
- The sample mounting part is themally insulated from the surrounding parts, and connected to the heat transfer parts via soft foil. This structure enables observation with very little drift
after the temperature is stabilized.
- We offer flexible customization such as electrodes for the sample. Along with temperature control, other functions could be combined, for example:
• Sample transfer in the air shut-off state
• 3-dimensional probe drive
* Measurement example in a room with temperature controlled at 23℃.
"Rear handle" refers to the part where the heat dissipating fins are attached.
Compatible TEMs (For standard models with a single function)
JEOL TEMs (Not compatible with ultra-high voltage microscopes)
Please contact us for other manufacturer's TEMs.
Specifications (For standard models with a single function)
Temperature stabilization |
Drift rate at -20 C Investigating |
Drift rate at +100 C Investigating |
Temperature control method |
Cooling: Current control (PID control is under development)
Heating: PID control / Current control
|
Heating / cooling temperature range |
-20~+100℃ |
* The minimum temperature depends on the ambient temperature.
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
Cooling TEM Holder is a holder to cool the sample on the holder, into which Liq.
N2 can be introduced for cooling, for high resolution observation and precise measurement.
- Clear atomic image observation is possible due to a bubbling prevented rear tank, from which Liq. N2 is piped to the sample stage for cooling down.
- This holder can cool down the sample and reduce damage of the sample caused by heating or electron beam irradiation.
- This holder can keep the sample at -150℃ for about 4 hours for the observation once after charging Liq.N2 into a rear tank.
- The head tip part is exchangeable as an attachment and can provide the most appropriate observation in the best condition depending on experimental purposes.
- This holder also can attached an evaporator to observe the sample surface during deposition or after deposition.
Sample size |
φ3×t0.03mm (Standard) |
Cooling |
-150℃ (after stabilized at -150℃, keep for 4 hours), with shield |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
This holder is a holder to heat a sample on the sample stage by assembling heating mechanism at the head tip for observation and measurement of atomic arrangement, physicochemical reaction and evaporation processes at high temperature.
- The sample heating mechanism enables observation and measurement on atomic configuration, physicochemical reaction and evaporation processes.
- Heating is done by non-inductive current heating mechanism (PG-PBN) with a tungsten-rhenium thermocouple for temperature measurement.
Sample size |
φ3×t0.03mm (Standard) |
Heating |
Max850℃/1123K, Current heating heater |
Thermocuople |
Tungsten-rhenium (W-Re) |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
Two-axis tilting and sample heating TEM holder can serve observation and measurement while heating the sample tilted on two axes by heating and tilting mechanism set up on the holder.
- Heating mechanism enables observation and measurement of atomic configuration, physicochemical reaction and evaporation processes while heating at high temperature.
- Heating is done by a non-inductive heater (PG-PBN) with a platinum-rhodium thermocouple for temperature measurement.
- The holder can change an incident beam angle to the sample by tilting the sample stage on the holder.
- The holder is compatible with the tilt-controller.
Sample size |
φ3×t0.03mm (Standard) |
Heating |
Max 850℃/1123K, Non-inductive heater (PG-PBN) |
Thermocouple |
Platinum-rhodium |
Tilt angle |
±20°
|
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
The Cleaning sample TEM holder has a function to clean the surface of a sample contaminated with hydrocarbon species by introducing reactive oxygen gas into a sample chamber and splay it on the surface to clean.
- The cleaning stage can be attached to the insertion part of the TEM Holders.
- Differential pumping of the radical oxygen generator is done by vacuum pumping for the SEM main unit.
- The radical oxygen generator can be attached with connecting flange.
(Radical oxygen generator itself is not included. Customer has to prepare it.)
Connecting flange |
NW40KF |
Pressure control |
Needle valve |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
The Gas-inlet TEM holder is a holder for observation and measurement of the sample while inletting gas close to the sample stage.
[1] T.Tanaka et al. Surface Science 604(2010) L75-L78
- This holder can realize as high resolution imaging as the standard holder does by suppress vibration with a miniaturized inlet valve driven by PZT actuators.
- Gas charging into a gas tank on the holder, and introducing gas into a sample chamber are possible.
- This holder enables to observe or measure the sample under relatively high vacuum pressure by separating the SEM chamber with multiple orifices from the sample chamber. Vacuum pumping can be done by the differential pumping on the holder, so it can reduce interference on TEM observation at high resolution.
Gas inlet valve |
Piezo-valve |
Gas tank |
1cm3 (1atm) |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
In-situ Observation TEM holder is a holder to measure the gas pressure near the sample stage during observation, while introducing gas to the holder.
- Gas inlet on a sample can be done through differential pumping.
- Gas is supplied on a sample from a reserve tank installed in a holder grip.
- The gas pressure on the sample can be measured by the thermocouple output of the gas sensor located by the sample stage.
- Inlet gas flow is controllable.
- The holder equips sample-tilting mechanism, and the gas is introduced, while tilting a sample.
- The x, y and z movement of the sample is carried out by a goniometer equipped in the TEM
- The size of the orifice for differential pumping can be changed by replacing the fixed component.
- Applicable inlet gases: oxygen, air, argon, mixture of carbon monoxide and air, mixture of hydrogen and argon etc.
(a gas blender and a gas supplier are not included, and customers have to prepare them.)
Sample size |
φ3×t0.03mm (Standard) |
Orifice |
φ0.2mm (Size change possible) |
Gas flow adjustment |
Needle valve |
Gas pressure measurement |
Thermocouple output (gas sensor) |
Movement |
X,Y ±1.0mm, Z±0.2mm (Within the limit of SEM goniometer) |
Tilt angle |
Max±10°on X-axis |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
Gas-inlet and Light-exposure TEM Holder is a holder able to inlet gas to the holder and to exposure light onto a sample under gas environment while observation and measurement.
- This holder can tilt the sample at least on one axis to prevent interference with the pole-piece.
- This holder can inlet oxygen gas or nitrogen gas onto the sample through the gas supply system outside, or through the reservoir tank.
- This holder can inlet gas onto the sample from the reservoir tank, which is built in the grip of the holder, without help of gas supply system.
- The gas flow can be controlled with two gas valves, the one of which is for fine control and the other one is for coarse one.
- This holder can expose light onto the sample by connecting with a light source.
(Light source is not included, and consumers have to prepare.)
- The holder is designed to disassemble the holder, and to exchange the parts of the gas inlet or the light exposure easily and quickly for adapting various kinds of experiments and observations.
Sample size |
φ3×t0.03mm (Standard) |
Orifice |
φ0.2mm (Size change possible) |
Gas inlet valve |
two valves (One for fine control)
Reservoir tank instaled
Sample tilt on one axis |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
The Gas-reacting TEM holder is a holder which can adopt samples made of particular kinds of materials shaped specially by like MEMS. This holder enables to observe and measure the surface of the sample at high resolution image, while the sample exposes to inlet gas.
- Various kinds of sample stages are available to meet particular kinds of materials of the samples and specially shaped samples.
- The holder equips the mechanism to tilt a sample on x-axis, and enable to observe and measure the sample at tilted angle while exposes the sample to inlet gas.
- The holder can tilt the sample on the sample stage on x-axis and also on y-axis.
(The rotation on x, y, and z-axis corresponds to those of the goniometer of the TEM.)
- Gas can be introduced onto a sample through the reservoir tank settled in the holder grip of the holder.
- Gas flow can be controlled.
- The gas pressure on the sample can be measured by the thermocouple output of the gas sensor located by the sample stage.
- The size of the orifice can be exchange by changing the fixed component.
- The gases suited to this holder are oxygen, air, argon, the mixture of carbon mono-oxide and air, the mixture of hydrogen and argon, etc. Gas-blender and gas- supplier have to be prepared by a customer.
Sample size |
φ3×t0.03mm (Standard) |
Orifice |
φ0.2mm (Size change possible) |
Gas flow adjustment |
Needle valve |
Gas pressure measurement |
Thermocouple output (gas sensor) |
Tilt angle |
Max±10°on x-axis, Max±3°on Y-axis |
Movement |
X,Y ±1.0mm, Z±0.2mm (Within the limit of SEM goniometer) |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
Two Gas-inlet TEM Holder can introduce two kinds of gases onto a sample, while observing or measuring the sample at high resolution in situ.
- This holder can introduce two kinds of gases independently, or blended gases at any ratio, to the sample stage separately connecting to two independent tanks with pipes.
- This holder can realize as high resolution imaging as the standard holder does by suppressing vibration with a miniaturized inlet valve driven by PZT actuators.
- The reservoir tank and the valve are easily replaced due to unit assembling.
- Any shapes of the sample stage of the holder can be arranged depending on materials or shapes from customers.
sample size |
φ3×t0.03mm |
Gas flow adjustment |
Needle valve |
Gas tank |
50cc×2p |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
Tensile-gaging TEM holder is a holder which can observe and measure a sample of thin film in situ, while applying the distortion or the tensile-to-failure on the sample.
- The sample stage is designed to meet with film shaped sample, and also the sample stage to meet particular shape of samples will be prepared depending on the purpose.
- The withdrawal mechanism on the sample is consisted of a PZT actuator for fine move and a DC motor for course one for sensitive adjustment.
- The tensile stress applied on the sample can be measured by a strain gage to measure the resistance of the gage with a bridge circuit.
- The withdrawal mechanism of the holder can measure the stress-strain properties of carbon Nano tubes.
sample size |
Film shape |
Tension drive |
Piezo scaner and DC motor |
Driving speed |
0.21mm/sec |
Tension measurement |
Strain-gage |
It is possible to add the current heating mechanism on the head tip of the holder to observe and measure the sample in situ under heating as an option.
Depending on application purpose, the positioning function also can be added to the withdrawal mechanism.
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
Evaporator installed TEM holder is a holder to observe and measure the sample surface in situ, on which materials are evaporated by current heating. The evaporator is installed at the head tip of the holder.
- The holder can observe and measure the sample surface in situ, while material is evaporating on the surface by the evaporator with a built-in heater, which is installed on the sample stage.
- The standard disks are available as a sample.
- The heater is a filament type made of tungsten, and for temperature measurement tungsten-rhenium (W-Re) thermocouple is used.
Sample size |
φ3×t0.03mm (Standard) |
Heater |
Tangsten filament (φ10μm), Current heating |
Thermocuouple |
Tangsten-rhenium(W-Re) |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
Atmosphere-blocked TEM Holder is a holder to observe and measure the sample, which can be inserted on the sample stage without espousing the atmospheric air for anaerobic material.
- This holder can observe and measure the sample, which has to be set-up on the sample stage of the holder in an air-free glove box for avoiding atmosphere exposure.
- This holder equips with four terminals for current connection, the max current of which is 0.5A each for observation of electrochemical reactions.
- The holder can tilt the sample on two axes against the pole piece.
- The holder blocks out the air with a sleeve cover type, which can easily apply to other type of TEM Holders.
- The sample stage of this holder is compatible among TEM holders, and can be mounted on other TEM holders.
- The holder equips a connecting port (NW10KF) to be able to evacuate inside to high vacuum.
- The vacuum level of the holder can keep 5×10-2Pa for about 10 minutes in standing alone from vacuum pumping.
Sample size |
φ3×t0.03mm (Standard) |
Sample stage tilt angle |
Less than 15°on X-axis, Les than 5°on Y-axis |
Four current terminals |
Max0.5A each |
Evaporation |
Current heating to source |
Vacuum keep |
For 10 min better than 5×10-2Pa |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
This transporting capsule can transfer FIB machined samples from FIB chamber to glove box, installing in tightly vacuum sealed capsule without exposing to the atmospheric air to prevent oxidation or contamination from the air.
- This transfer capsule is designed for transferring the samples processed in many ways in a vacuum apparatus to a glove box, loading the sample in a tightly vacuum sealed capsule.
- The O-ring seal screw capsule is easily mounted on the holder by adjusting attaching position with a below joint.
- The entry box has view ports on two side walls and upper ceiling to easily set up the sample on the sample stage in vacuum-sealed capsule.
sample size |
Tight holder type |
Sealing |
O-ring |
Transfer distance |
100mm |
Alignment adjustment |
Bellows joint : KBL-34 |
Entry box with veiwport windows |
Ask us for any requests on the experiment and measurement. We could be ready for designing and manufacturing based on our customer's requests.
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