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Beam flux monitor
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上下機構(ストローク:50mm)
回転機構付き
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本体側面
先端センサー部
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Estimate |
Beam flux monitor |
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Beam flux monitor is a device to measure the intensity of molecular beam from a crucible by using a tiny B-A gage, and is used in MBE system. This monitor is compactly mounted on a rotary feed through with ICF-700 flange. Any accessible length of the feed through is available on the customer's request.
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- The monitor uses the miniature B-A gage made by Canon-ANELVA, which has long experience and reliability in the field.
- ICF-70 flange is for mounting.
- The sealed cover on the sensor can protect the sensor form exposure as much as possible.
- An analog signal output is available.
- Max.200℃ baking is possible.
- Much less out gassing from the components of the monitor is realized by the special surface finish treatment.
- The measuring the flux is ready to set up by just only rotating the sensor 180 degree.
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- Sensor: Miniature B-A gage
- Rotational angle : +/- 180 degree
- Mounting flange size: ICF-70 (tapped)
- Baking temperature: Max 200℃ (except: electric connector)
- Option: Up/down elevating mechanism
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