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 Home ＞ Products｜OLED Production Systems for R&D｜OLED Production Systems for R&D |
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 Organic transistors
on an Si substrate <Source> NHK Science & Technology Research Laboratories  Organic deposition cell: KOD-Cell
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- Designed to take up less space and achieve compactness.
- Up to five deposition cells can be installed.
- Accepts substrates whose size is from 1 to 3 inches.
- Equipped with a double shield that prevents contamination.
- Comes equipped with a substrate heater control mechanism.
- Designed to achieve easy maintenance and cleaning.
| Type | OED R&D System I | ||||||
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| No. of organic deposition cells | 4 (with power supply control) | ||||||
| No. of metal deposition cells | 4 (with power supply control) | ||||||
| Substrate size | 1 - 3 inches (Up to eight substrates can be accommodated.) | ||||||
| No. of Vacuum pumps |
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| No. of vacuum gauges | 3 | ||||||
| No. of film thickness meters | 2 | ||||||
| Shutter | One shutter on the substrate side | ||||||
| No. of purge Valves | 1 | ||||||
| Substrate heater (300°C) | 1 (with power supply control) | ||||||
| Sales price | Contact our company. | ||||||
| Estimate |
* Our company can tailor the product according to your specifications. Click here to contact us.
Organic Electronics Device R&D System II
OED R&D System II
 Organic deposition cell:
KOD-Cell |
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- Designed to take up less space and achieve compactness.
- Up to five deposition cells can be installed.
- Accepts substrates whose size is from 1 to 3 inches.
- Equipped with a double shield that prevents contamination.
- Comes equipped with a substrate heater control mechanism.
- Designed to achieve easy maintenance and cleaning.
| Type | OED R&D System II | ||||||
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| No. of organic deposition cells | 2 (with power supply control) | ||||||
| No. of metal deposition cells | 2 (with power supply control) | ||||||
| Substrate size | 1 - 3 inches (Up to eight substrates can be accommodated.) | ||||||
| No. of Vacuum pumps |
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| No. of vacuum gauges | 3 | ||||||
| No. of film thickness meters | 2 | ||||||
| Shutter | One shutter on the substrate side | ||||||
| No. of purge valves | 2 | ||||||
| Substrate heater (300°C) | 1 (with power supply control) | ||||||
| Sales price | Contact our company. | ||||||
| Estimate |
* Our company can tailor the product according to your specifications. Click here to contact us.
Organic Electronics Device R&D System III
OED R&D System III
 Deposition room
 Substrate holder &
heating unit  Organic deposition cell:
KOD-Cell  Alq3 film is deposited on an ITO/glass substrate. The photo shows a light-emitting element formed in this process.
<Source> Japan Advanced Institute of Science and Technology |
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- Allows ultra-high vacuum deposition.
- Designed to take up less space and achieve compactness
- Up to nine deposition cells can be installed.
- Accepts substrates whose size is from 1 to 3 inches.
- Equipped with a double shield that prevents contamination.
- Equipped with a rotational platform system for even film formation
- Masks can be replaced during vapor deposition.
- Comes equipped with a substrate heater control mechanism.
- Designed to achieve easy maintenance and cleaning.
- Characterizes organic electronics devices in ultra-high vacuum environments.
- Equipped with twin probes.
- Characterize two substrates under the same conditions at the same time.
- Gas analysis and characterization can be done by Q-Mass (optionally available).
- Makes simple characterizations on the life and luminance of formed elements
- Equipped with a shuttle case in which a vacuum environment can be preserved and which can be transferred.
- Equipped with a hatch that allows easy taking in and out of substrates.
| Type | OED R&D System III | ||||||||||||
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| No. of organic deposition cells | 8 (with power supply control) | ||||||||||||
| No. of metal deposition cells | 1 (with power supply control) (two-element metal deposition cells) | ||||||||||||
| Substrate size | 1 - 3 inches (Up to four substrates can be accommodated.) | ||||||||||||
| No. of Vacuum pumps |
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| No. of vacuum gauges | 3 | ||||||||||||
| No. of film thickness meters | 2 | ||||||||||||
| Shutter mechanism | One shutter on the substrate side | ||||||||||||
| No. of purge Valves | 2 | ||||||||||||
| Substrate heater (300°C) | 1 (with power supply control) | ||||||||||||
| No. of mask holders to be accommodated | 5 (Max. 6) | ||||||||||||
| Twin probes | 1 set | ||||||||||||
| Sales price | Contact our company. | ||||||||||||
| Estimate |
* Our company can tailor the product according to your specifications. Click here to contact us.
Organic Thin Film Simplified R&D System
OTFS R&D System
 Metal deposition single cell: KMDS-Cell
 OTFS-R&D System
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- Designed to take up less space and achieve compactness
- Up to five deposition cells can be installed.
- Accepts substrates whose size is from 1 to 3 inches.
- Equipped with a double shield that prevents contamination.
- Comes equipped with a substrate heater control mechanism.
- Designed to achieve easy maintenance and cleaning.
| Type | OTFS R&D System | ||||
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| No. of organic deposition cells | 2 (with power supply control) | ||||
| No. of metal deposition cells | 1 (with power supply control) | ||||
| Substrate size | 1 - 3 inches (Up to eight substrates can be accommodated.) | ||||
| No. of Vacuum pumps |
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| No. of vacuum gauges | 1 | ||||
| No. of film thickness meters | 1 | ||||
| Shutter mechanism | One shutter on the substrate side | ||||
| No. of purge valves | 1 | ||||
| Substrate heater (300°C) | 1 (with power supply control) | ||||
| Sales price | Contact our company. | ||||
| Estimate |
* Our company can tailor the product according to your specifications. Click here to contact us.
Joint research with
- NHK Science & Technology Research Laboratories
http://www.nhk.or.jp/strl/group/zairyo_device/zairyo_device05.html - Japan Advanced Institute of Science and Technology
http://www.jaist.ac.jp/ms/labs/murata/
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