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OLED Production Systems for R&D

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OLED Production Systems for R&D

Organic Electronics Device R&D System I
OED R&D System I

Organic transistors on an Si substrate
Organic transistors
on an Si substrate
<Source>
NHK Science & Technology
Research Laboratories
Organic deposition cell: KOD-Cell
Organic deposition cell: KOD-Cell
OED R&D System I
Features
  • Designed to take up less space and achieve compactness.
  • Up to five deposition cells can be installed.
  • Accepts substrates whose size is from 1 to 3 inches.
  • Equipped with a double shield that prevents contamination.
  • Comes equipped with a substrate heater control mechanism.
  • Designed to achieve easy maintenance and cleaning.
Standard specifications
Type OED R&D System I
No. of organic deposition cells 4 (with power supply control)
No. of metal deposition cells 4 (with power supply control)
Substrate size 1 - 3 inches (Up to eight substrates can be accommodated.)
No. of Vacuum pumps
Turbo Molecular Pumps (63L/sec) 1
Turbo Molecular Pumps (300L/sec) 2
Rotary Pumps (150L/min) 3
No. of vacuum gauges 3
No. of film thickness meters 2
Shutter One shutter on the substrate side
No. of purge Valves 1
Substrate heater (300°C) 1 (with power supply control)
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Organic Electronics Device R&D System II
OED R&D System II

Organic deposition cell: KOD-Cell
Organic deposition cell:
KOD-Cell
OED R&D System II
OED R&D System II
Features
  • Designed to take up less space and achieve compactness.
  • Up to five deposition cells can be installed.
  • Accepts substrates whose size is from 1 to 3 inches.
  • Equipped with a double shield that prevents contamination.
  • Comes equipped with a substrate heater control mechanism.
  • Designed to achieve easy maintenance and cleaning.
Standard specifications
Type OED R&D System II
No. of organic deposition cells 2 (with power supply control)
No. of metal deposition cells 2 (with power supply control)
Substrate size 1 - 3 inches (Up to eight substrates can be accommodated.)
No. of Vacuum pumps
Turbo Molecular Pumps (63L/sec) 1
Turbo Molecular Pumps (300L/sec) 2
Rotary Pumps (150L/sec) 3
No. of vacuum gauges 3
No. of film thickness meters 2
Shutter One shutter on the substrate side
No. of purge valves 2
Substrate heater (300°C) 1 (with power supply control)
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Organic Electronics Device R&D System III
OED R&D System III

Deposition room
Deposition room
Substrate holder & heating unit
Substrate holder &
heating unit
Organic deposition cell: KOD-Cell
Organic deposition cell:
KOD-Cell
ITO/ガラス基板上へのAlq3膜の発光素子
Alq3 film is deposited on an ITO/glass substrate. The photo shows a light-emitting element formed in this process.
<Source>
Japan Advanced Institute of Science and Technology
OED R&D System III
Features of the vapor deposition room
  • Allows ultra-high vacuum deposition.
  • Designed to take up less space and achieve compactness
  • Up to nine deposition cells can be installed.
  • Accepts substrates whose size is from 1 to 3 inches.
  • Equipped with a double shield that prevents contamination.
  • Equipped with a rotational platform system for even film formation
  • Masks can be replaced during vapor deposition.
  • Comes equipped with a substrate heater control mechanism.
  • Designed to achieve easy maintenance and cleaning.
Features of the characterization room
  • Characterizes organic electronics devices in ultra-high vacuum environments.
  • Equipped with twin probes.
  • Characterize two substrates under the same conditions at the same time.
  • Gas analysis and characterization can be done by Q-Mass (optionally available).
  • Makes simple characterizations on the life and luminance of formed elements
Load lock room
  • Equipped with a shuttle case in which a vacuum environment can be preserved and which can be transferred.
  • Equipped with a hatch that allows easy taking in and out of substrates.
Standard specifications
Type OED R&D System III
No. of organic deposition cells 8 (with power supply control)
No. of metal deposition cells 1 (with power supply control) (two-element metal deposition cells)
Substrate size 1 - 3 inches (Up to four substrates can be accommodated.)
No. of Vacuum pumps
Turbo Molecular Pumps (500L/sec) 1
(50L/sec) 1
Scroll Pumps (500L/min) 2
Turbo Molecular Pumps (250L/sec) 1
(50L/sec) 1
Scroll Pumps (250L/min) 1
No. of vacuum gauges 3
No. of film thickness meters 2
Shutter mechanism One shutter on the substrate side
No. of purge Valves 2
Substrate heater (300°C) 1 (with power supply control)
No. of mask holders to be accommodated 5 (Max. 6)
Twin probes 1 set
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Organic Thin Film Simplified R&D System
OTFS R&D System

Metal deposition single cell: KMDS-Cell
Metal deposition single cell: KMDS-Cell
OTFS-R&D System
OTFS-R&D System
Organic Thin Film Simplified R&D System
Features
  • Designed to take up less space and achieve compactness
  • Up to five deposition cells can be installed.
  • Accepts substrates whose size is from 1 to 3 inches.
  • Equipped with a double shield that prevents contamination.
  • Comes equipped with a substrate heater control mechanism.
  • Designed to achieve easy maintenance and cleaning.
Standard specifications
Type OTFS R&D System
No. of organic deposition cells 2 (with power supply control)
No. of metal deposition cells 1 (with power supply control)
Substrate size 1 - 3 inches (Up to eight substrates can be accommodated.)
No. of Vacuum pumps
Turbo Molecular Pumps (63L/sec) 1
Rotary Pumps (150L/min) 1
No. of vacuum gauges 1
No. of film thickness meters 1
Shutter mechanism One shutter on the substrate side
No. of purge valves 1
Substrate heater (300°C) 1 (with power supply control)
Sales price Contact our company.
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Joint research with

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