SEM: Ultra-high vacuum system for SEM

Scanning Electron Microscope

The image of SEM

This is an ultra-high vacuum system for SEM (Scanning Electron Microscope) to observe the sample's surface topography on the CRT, by scanning the surface with an electron probe and detecting the second electrons generated out of the sample. This is also applied to measure the side length of semiconductor, to inspect the surface, to do mask lithography and so on.

The SEM unit is made by APCO Ltd. ( http://homepage3.nifty.com/APCO/index.html )

RIKEN, National Institute for Materials Science (NIMS)
etc.