 HOME ＞ 製品案内｜有機・金属蒸着セル ＞ Organic Deposition Cell |
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  Alq3 film is deposited on an ITO/glass substrate.
The photo shows a light-emitting element formed in this process. <Source> Japan Advanced Institute of Science and Technology |
| Type | KOD-Cell |
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| Crucible capacity | 1cc |
| Standard price | ¥480,000 |
| Estimate |
| Heater | Sheath heater |
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| Max. stable operation temperature |
500°C |
| Temperature stability | ±0.2°C |
| Thermocouple | Type K (C/A) |
| Crucible materials | AlN-BN, high-density carbon, Al2O3, silica glass, and AlN |
| Crucible capacity | 1cc |
| Cooling system | Water-cooling jacket (Stainless steel 1/4" tube) |
| Shutter mechanism | Manually operated or compressed air operated (optionally available) |
| In-plane distribution | The following distribution is guaranteed on a 2-inch diameter surface.
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| Material efficiency | The following thin film formation from organic materials is guaranteed in the 1-cc crucible.
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| Deposition rate | It is easily possible to achieve 0.01Å/s. (Using a film thickness meter made by INFICON is recommended.) |
| Target-Substrate distance |
The recommended distance from the substrate to the deposition source is 250 mm. |
| Deposition characteristics |
See the chart below. |
Since the crucible capacity is small (1 cc), the cell can easily be used for various purposes.
The cell is made from carefully selected materials; its simple structure allows easy maintenance.
The materials are the same as those of sheath heaters, preserving uniform temperature.
The shutter mechanism easily allows the adjustment of vapor deposition.
- Excellent temperature stability: ±0.2°C
- Overshoot: 0.2°C or less
| Temperature characteristics of the organic deposition cell, KOD-Cell |
Vapor deposition characteristics with low-rate control |
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- Thin film formation from materials of high vapor pressure
- Thin film formation from organic materials
*Our company can tailor the product (its stroke, shapes, etc.) according to the customer's specifications. Click here to contact us.
Organic Deposition Cell Type II
KOD-Cell II
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| Type | KOD-Cell II |
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| Crucible capacity | 10cc/4cc |
| Standard price | ¥680,000 |
| Estimate |
| Heating control temperature | 100°C to 500°C |
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| Crucible materials | AlN-Bn, high-density carbon, Al2O3, silica glass, and AlN |
| Power supply controller | Main power supply: 100V AC, PID controlled |
- ICF-70 allows compactness and small footprint.
- The cell comes equipped with a shutter mechanism.
- Temperatures can be set with an accuracy of ±0.1°C.
*Our company can tailor the product (its stroke, shapes, etc.) according to the customer's specifications. Click here to contact us.
Power supply for organic deposition cells
KTC-2A
This product is a small-size AC power supply that complies with our organic deposition cells, the KOD Series. SCR phase control is used to control power supply. The specified supply voltage is 100 V.
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| Type | KTC-2A (Standard type) |
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| Standard price | ¥250,000 |
| Estimate |
| Type | KTC-2ASP (with a program controller) |
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| Standard price | ¥350,000 |
| Estimate |
- SCR phase control is used to control power supply.
- REX-D100, a temperature controller distributed by RKC INSTRUMENT INC., is used as the controller (for the Standard type).
- If the customer wishes to control temperature with a program, PF900 (RKC INSTRUMENT INC.) can be used (for KTC-2ASP).
- The maximum current capacity is 20 A.
- The ammeter is 2 A to comply with the specifications of the KOD Series (since the set temperature is achieved when the specified current is equal to or less than 1 A).